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Conference Paper Design and Fabrication of 4H-SiC Lateral IGBT with Drift Segmentation using Trench Process
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Authors
Jong-Il Won, Kun-Sik Park, Doo-Hyung Cho, Jong-Moon Park, Sang-Gi Kim
Issue Date
2018-02
Citation
한국 반도체 학술 대회 (KCS) 2018, pp.826-826
Language
English
Type
Conference Paper
KSP Keywords
4H-SiC, Design and fabrication, lateral IGBT