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Cost-Effective 2 × 2 Silicon Nitride Mach-Zehnder Interferometric (MZI) Thermo-Optic Switch
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- Authors
- Jiho Joo, Jaegyu Park, Gyungock Kim
- Issue Date
- 2018-04
- Citation
- IEEE Photonics Technology Letters, v.30, no.8, pp.740-743
- ISSN
- 1041-1135
- Publisher
- IEEE
- Language
- English
- Type
- Journal Article
- Abstract
- We present cost effective 2×2 silicon nitride Mach-Zehnder interferometric thermo-optic switches with 1 mm-length phase shifter. Devices were fabricated on a bulk silicon wafer with CMOS compatible process. The footprint was 0.7 mm2. For the device designed for {\\lambda}~1310nm, we demonstrated 26.8-dB crosstalk, 0.23-dB insertion loss, and 17.25-μ switching speed at {\\lambda}~ 1325.8nm. Similarly, {\\lambda}~ 1550 nm device showed the 24.7-dB crosstalk, 0.48-dB insertion loss, and 17.48-μ switching speed at {\\lambda} ~ 1550.8nm. The measured operating power was 55.6 and 64.4 mW at {\\lambda} ~1325.8 nm and {\\lambda} ~ 1550.8 nm, respectively.
- KSP Keywords
- 1550 nm, 7 mm, Bulk silicon, CMOS compatible process, Mach-Zehnder(MZ), Operating power, Phase Shifter, Silicon Nitride, Silicon wafer, Switching speed, Thermo-optic switch