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Conference Paper Stress-Controlled PECVD Si3N4 Diaphragm-based Capacitive-Type Acoustic Sensor for IoT Application
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Authors
Jaewoo Lee, J. Im, J.H. Kim, S.-Y. Lim, J.S. Heo, S.-M. Lee, S.E. Moon
Issue Date
2017-11
Citation
한국센서학회 종합 학술 대회 2017, pp.145-146
Publisher
한국센서학회
Language
English
Type
Conference Paper
KSP Keywords
Acoustic Sensor, Capacitive-type, IoT Applications