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P2GS.13 - Fabrication of ZnO-Based Ethanol Gas Sensors Using Aerosol-Assisted Atmospheric Pressure Plasma
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- Authors
- Do Yeob Kim, Choon-Sang Park, Jae Eun Lee, Heung-Sik Tae, Hyung-Kun Lee
- Issue Date
- 2018-07
- Citation
- International Meeting on Chemical Sensors (IMCS) 2018, pp.792-793
- Language
- English
- Type
- Conference Paper
- Abstract
- This contribution studies a fast and simple method for depositing metal oxides by using an aerosol-assisted atmospheric pressure plasma process. ZnO films were deposited on arbitrary substrates and characterized by scanning electron microscopy and X-ray diffraction. In addition, ZnO-based gas sensors were tested for the detection of ethanol gas at concentrations between 100 ppb to 1000 ppb. In this study, ZnO was adopted as an example of metal oxides that can be deposited but it is possible to produce various metal oxides using the aerosol-assisted atmospheric pressure plasma process.
- KSP Keywords
- Atmospheric Pressure Plasma, Ethanol gas, Metal-oxide(MOX), Plasma process, Scanning electron microscopy(S.E.M.), Scanning electron microscopy and X-ray diffraction, ZnO films, aerosol-assisted, gas sensor, simple method