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Conference Paper
A Study on the Effect of Dry Etching Damage in BCE Oxide Thin-Film Transistors
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- Authors
- Ji Hun Choi, Jong-Heon Yang, Jae-Eun Pi, Chi-Young Hwang, Kyunghee Choi, Hee-Ok Kim, Chi-Sun Hwang
- Issue Date
- 2018-08
- Citation
- International Meeting on Information Display (IMID) 2018, pp.134-134
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Etching damage, Thin-Film Transistor(TFT), dry etching, oxide thin-film transistors, thin film(TF)