ETRI-Knowledge Sharing Plaform

KOREAN
논문 검색
Type SCI
Year ~ Keyword

Detail

Conference Paper A Study on the Effect of Dry Etching Damage in BCE Oxide Thin-Film Transistors
Cited - time in scopus Share share facebook twitter linkedin kakaostory
Authors
Ji Hun Choi, Jong-Heon Yang, Jae-Eun Pi, Chi-Young Hwang, Kyunghee Choi, Hee-Ok Kim, Chi-Sun Hwang
Issue Date
2018-08
Citation
International Meeting on Information Display (IMID) 2018, pp.134-134
Language
English
Type
Conference Paper
KSP Keywords
Etching damage, Thin-Film Transistor(TFT), dry etching, oxide thin-film transistors, thin film(TF)