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Conference Paper Laser Irradiation System for GaAs Dicing; Preliminary Study
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Authors
Hyun-Woo Song, Jongdeog Kim
Issue Date
2018-08
Citation
Optics and Photonics Congress 2018, pp.268-268
Publisher
Optical Society of Korea
Language
English
Type
Conference Paper
Abstract
― We have studied on a reaction system between high energy laser pulse and n-GaAs substrate for stealth dicing. Front side irradiation parameters resulting in back side damages were obtained in the reaction chamber that has low pressure environment.
KSP Keywords
Front side, High energy laser, Irradiation parameters, Laser irradiation, Laser pulse, Low pressure, Preliminary study, Reaction chamber, Reaction system, n-GaAs substrate, stealth dicing