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Conference Paper
Laser Irradiation System for GaAs Dicing; Preliminary Study
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- Authors
- Hyun-Woo Song, Jongdeog Kim
- Issue Date
- 2018-08
- Citation
- Optics and Photonics Congress 2018, pp.268-268
- Publisher
- Optical Society of Korea
- Language
- English
- Type
- Conference Paper
- Abstract
- ― We have studied on a reaction system between high energy laser pulse and n-GaAs substrate for stealth dicing. Front side irradiation parameters resulting in back side damages were obtained in the reaction chamber that has low pressure environment.
- KSP Keywords
- Front side, High energy laser, Irradiation parameters, Laser irradiation, Laser pulse, Low pressure, Preliminary study, Reaction chamber, Reaction system, n-GaAs substrate, stealth dicing