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Conference Paper
P2NG.16 - Spontaneous Deposition of Cobalt Oxide Nanoplates for Application to Acetone Gas Sensors
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- Authors
- Ahyeon Ma, Hyung Ju Park, Jong Hyeok Seo, Jae Eun Lee, Do Yeob Kim, Hyung Kun Lee, Ki Min Nam, Dae-Sik Lee
- Issue Date
- 2018-07
- Citation
- International Meeting on Chemical Sensors (IMCS) 2018, pp.874-875
- Language
- English
- Type
- Conference Paper
- Abstract
- The development of sensing materials, which influence the practical gas sensing performance, is critically important for the further evolution of semiconducting metal oxide gas sensor. Especially, cobalt oxides have attracted great interest in their potential applications as solid-state sensors because of their chemical stability and semiconducting properties. In this study, we are reporting the spontaneous deposition of Co3O4 nanoplates on interdigitated electrodes and its application to gas sensors. Inducing the phase transition of h-CoO to Co(OH)2 and consecutive thermal oxidation on silicon substrate results in efficient deposition between Co3O4 and the substrate without any additional deposition processes. The efficient deposition of Co3O4 nanoplates is applicable for acetone gas sensors.
- KSP Keywords
- Gas sensing performance, Interdigitated Electrode(IDE), Metal-oxide(MOX), Phase transition, Potential applications, Semiconducting metal oxide(SMO), Semiconducting properties, Sensing material, Silicon substrate, Solid-state sensors, Thermal oxidation