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Conference Paper
Laser Irradiation System for n-GaAs Stealth Dicing
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- Authors
- Hyun-Woo Song, Jongdeog Kim
- Issue Date
- 2018-11
- Citation
- International Photonics and Optoelectronics Meeting (POEM) 2018, pp.1-2
- Language
- English
- Type
- Conference Paper
- Abstract
- We report a laser reaction system providing back-side damages from front-side irradiation for n++ GaAs stealth dicing. High energy laser pulses of 10 μJ at 1030 nm were used in a low pressure reaction chamber.
- KSP Keywords
- Front side, High energy laser, Laser irradiation, Laser pulse, Low pressure, Reaction chamber, Reaction system, n-GaAs, stealth dicing