상세정보
학술대회
Laser Irradiation System for n-GaAs Stealth Dicing
- 발행일
- 201811
- 출처
- International Photonics and Optoelectronics Meeting (POEM) 2018, pp.1-2
- 협약과제
- 18HS1900, 고품질 생체정보 획득 분석을 위한 단층 이미징 및 인식 센서 기술 연구, 채병규
- 초록
- We report a laser reaction system providing back-side damages from front-side irradiation for n++ GaAs stealth dicing. High energy laser pulses of 10 μJ at 1030 nm were used in a low pressure reaction chamber.
- KSP 제안 키워드
- Front-side, High energy laser, Laser pulse, Reaction chamber, Reaction system(R system), laser irradiation, low pressure, n-GaAs, stealth dicing