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Conference Paper Laser Irradiation System for n-GaAs Stealth Dicing
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Authors
Hyun-Woo Song, Jongdeog Kim
Issue Date
2018-11
Citation
International Photonics and Optoelectronics Meeting (POEM) 2018, pp.1-2
Language
English
Type
Conference Paper
DOI
https://dx.doi.org/10.1364/OEDI.2018.OT4A.50
Abstract
We report a laser reaction system providing back-side damages from front-side irradiation for n++ GaAs stealth dicing. High energy laser pulses of 10 μJ at 1030 nm were used in a low pressure reaction chamber.
KSP Keywords
Front side, High energy laser, Laser irradiation, Laser pulse, Low pressure, Reaction chamber, Reaction system, n-GaAs, stealth dicing