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학술지 A Fully Closed Nano-Focus X-Ray Source With Carbon Nanotube Field Emitters
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저자
박소라, 강준태, 정진우, 김재우, 윤기남, 전효진, 고은솔, 이정웅, 안유정, 연지환, 김성희, 송윤호
발행일
201812
출처
IEEE Electron Device Letters, v.39 no.12, pp.1936-1939
ISSN
0741-3106
출판사
IEEE
DOI
https://dx.doi.org/10.1109/LED.2018.2873727
협약과제
18JB1400, 고속, 가변 프레임의 디지털 엑스선 소스를 이용한 엑스선 투시 영상 시스템 기술 개발, 송윤호
초록
We developed a fully closed nano-focus X-ray source using carbon nanotube (CNT) field emitters. The nano-focus X-ray source includes a fully vacuum-sealed CNT Electron-gun (E-gun) tube and E-beam-focusing modules consisting of electrostatic and magnetic lenses, facilitating very compact and high-resolution X-ray imaging. The paste-printed CNT emitters were prepared in a small pattern as an electron source, and the entire components, including the CNT emitter module, Cu tubes, collimators, and transmissive anode target, were specially brazed at an elevated temperature, resulting in a very compact E-gun tube. The CNT emitter showed a stable and reliable emission current with its density of over 300 mA/cm2 even in the vacuum-sealed E-gun tube. With the anode grounded and the CNT emitter module biased to negative high voltages, we achieved a considerably magnified X-ray image of a several hundred nanometer resolution. The fully vacuum-sealed CNT E-gun tube along with the magnetic lens module can offer much more compact, easily maintainable, high-resolution X-ray imaging compared with conventional open-type thermionic X-ray sources.
KSP 제안 키워드
Carbon nano-tube(CNT), E-Beam, Gun tube, High-resolution, Lens module, Magnetic lenses, Nanometer resolution, X-ray imaging, X-ray sources, electron source, elevated temperature