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Conference Paper
High Mobility Transparent Thin Film Transistor with 5nm-Indium Oxide by Atomic Layer Deposition
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- Authors
- Jongchan Lee, Seung-Youl Kang, Jaehyun Moon, Jae-Eun Pi, Seong-Deok Ahn, Himchan Oh, Kwang Ho Kwon
- Issue Date
- 2018-08
- Citation
- International Meeting on Information Display (IMID) 2018, pp.535-535
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Atomic Layer Deposition, High Mobility, Thin-Film Transistor(TFT), indium oxide, thin film(TF), transparent thin film transistor(TTFT)