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ZnO Nanowire-based Capacitive Humidity Sensor Integrated on a Polyimide Layer with a Micro-heater
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- 발행일
- 201811
- 출처
- International Conference and Exhibition for Nanotechnology (NANOPIA) 2018, pp.1-1
- 협약과제
- 18HB3800, IoT 불꽃감지용 ROIC 내장 CMOS-MEMS 표면가공기반 초소형 적외선 검출기 개발, 이재우
- KSP 제안 키워드
- Micro-heater, Polyimide layer, ZnO nanowire, capacitive humidity sensor