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Conference Paper
ZnO Nanowire-based Capacitive Humidity Sensor Integrated on a Polyimide Layer with a Micro-heater
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- Authors
- Jaewoo Lee, J. Im, J.H. Kim, S.-Y. Lim, E.B. Jeon, S. M. Moon
- Issue Date
- 2018-11
- Citation
- International Conference and Exhibition for Nanotechnology (NANOPIA) 2018, pp.1-1
- Language
- English
- Type
- Conference Paper
- Project Code
- 18HB3800, CMOS-MEMS Surface-type based ultra-small infrared detector integrated with ROIC for flame sensing of IoT, Jaewoo Lee
- KSP Keywords
- Micro-heater, Polyimide layer, ZnO nanowire, capacitive humidity sensor