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Conference Paper ZnO Nanowire-based Capacitive Humidity Sensor Integrated on a Polyimide Layer with a Micro-heater
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Authors
Jaewoo Lee, J. Im, J.H. Kim, S.-Y. Lim, E.B. Jeon, S. M. Moon
Issue Date
2018-11
Citation
International Conference and Exhibition for Nanotechnology (NANOPIA) 2018, pp.1-1
Language
English
Type
Conference Paper
Project Code
18HB3800, CMOS-MEMS Surface-type based ultra-small infrared detector integrated with ROIC for flame sensing of IoT, Jaewoo Lee
KSP Keywords
Micro-heater, Polyimide layer, ZnO nanowire, capacitive humidity sensor