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Conference Paper
Equivalent Circuit-based Open-circuit Sensitivity Modelling of a Capacitive-type MEMS Acoustic Sensor on Wafer Level
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- Authors
- Jaewoo Lee, J. Im, J.H. Kim, S.Y Lim, S.E. Moon
- Issue Date
- 2018-09
- Citation
- Eurosensors 2018, pp.1-4
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Acoustic Sensor, Capacitive-type, Circuit-based, Equivalent Circuit, open-circuit, wafer level