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Conference Paper Equivalent Circuit-based Open-circuit Sensitivity Modelling of a Capacitive-type MEMS Acoustic Sensor on Wafer Level
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Authors
Jaewoo Lee, J. Im, J.H. Kim, S.Y Lim, S.E. Moon
Issue Date
2018-09
Citation
Eurosensors 2018, pp.1-4
Language
English
Type
Conference Paper
KSP Keywords
Acoustic Sensor, Capacitive-type, Circuit-based, Equivalent Circuit, open-circuit, wafer level