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학술지 Elastomer Thin-film Pressure Sensor based on Embedded Photonic Tunnel-junction Arrays
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저자
윤재웅, 김진태, 박봉제, 윤성률, 문성철, 박승구, 박선택
발행일
201808
출처
Optics Letters, v.43 no.16, pp.3953-3956
ISSN
0146-9592
출판사
Optical Society of America(OSA)
DOI
https://dx.doi.org/10.1364/OL.43.003953
협약과제
18JS1400, 능동 가변 렌즈 어레이용 광학계 연구, 박선택
초록
We propose an elastomer thin-film pressure sensor enabled by pressure-sensitive optical signals through vertical photonic tunnel-junction couplers. We provide the operation principle, design, fabrication, and test results from a 50 μm thick polydimethylsiloxane sheet accommodating embedded vertical photonic tunnel-junction couplers. The result with a 5 mm long device shows a differential optical power change that is ~140% of the incident power under moderate external pressure of ~40 kPa, thereby clearly demonstrating a robust pressure-sensing capability realized in a highly flexible, lightweight, transferrable, optically transparent, and bio-compatible thin-film material. Therefore, the proposed approach potentially enables versatile pressure and touch sensors for many applications in practice.
KSP 제안 키워드
Highly flexible, Operation principle, Optical power, Polydimethylsiloxane sheet, Power change, Pressure Sensor, Sensor based, Thin film materials, external pressure, optically transparent, pressure sensitive