상세정보
학술지
A 10-channel Multiple Quantum Well Array Integrated with Selective Area Grown InGaAsP Layers on InP
- 발행일
- 201811
- 출처
- Applied Science and Convergence Technology, v.27 no.6, pp.153-155
- ISSN
- 1225-8822
- 출판사
- 한국진공학회
- 협약과제
- 18HB3300, 이동통신용 O-band Tunable DBR TOSA 개발, 김기수
- 초록
- We present a ten-channel selective area grown multiple quantum well array with a wavelength of 8 nm spacing which can offer the tailored bandgap to each channel for application of monolithically integrated multi-channel devices.Scanning electron microscope images and photoluminescence spectra of the selective area grown layers for all channels are examined and analysed experimentally. We find out that, as a function of opening width, the thickness of selective area grown layers is linearly changed and the photoluminescence peak wavelength of selective area grown multiple quantum well array is varied with a quadratic shape. As a result, it is confirmed that extremely uniform and stable selective area grown layers can be obtained at the opened area between the adjacent mask patterns without significant degradation in spectral quality.
- KSP 제안 키워드
- Multiple-quantum-well(MQW), Opening width, Peak wavelength, Photoluminescence spectra, Quantum Well(QW), Scanning electron microscope images, Selective area, monolithically integrated, multi-channel, spectral quality