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Conference Paper
In-Depth Analysis of Phase Distribution in Zn(O,S) Thin Films Deposited by a Reactive Sputtering
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- Authors
- Dae-Hyung Cho, Woo-Jung Lee, Byungha Shin, Yong-Duck Chung
- Issue Date
- 2019-04
- Citation
- Materials Research Society (MRS) Meeting 2019 (Spring), pp.1-1
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- In-depth analysis, Phase distribution, Reactive sputtering, thin film(TF)