상세정보
학술지
Terahertz Continuous Wave System using Phase Shift Interferometry for Measuring the Thickness of Sub-100-μm-thick Samples without Frequency Sweep
- 발행일
- 201905
- 출처
- Optics Express, v.27 no.10, pp.14695-14704
- ISSN
- 1094-4087
- 출판사
- Optical Society of America (OSA)
- 협약과제
- 19ZR1200, 지능형 전파센서 및 무선 에너지 전송 원천기술 개발, 이호진
- 초록
- A terahertz continuous wave system is demonstrated for thickness measurement using Gouy phase shift interferometry without frequency sweep. One arm of the interferometer utilizes a collimated wave as a reference, and the other arm applies a focused beam for sample investigation. When the optical path difference (OPD) of the arms is zero, a destructive interference pattern is produced. Interference signal intensity changes induced by the OPD changes can be easily predicted by calculations. By minimizing the difference between the measured and the calculated signal against the OPD, the thicknesses of sub-100μm-thick samples are determined at 625 GHz.
- KSP 제안 키워드
- 5 GHz, Destructive interference, Frequency sweep, Gouy phase shift, Optical Path Difference, Signal intensity, continuous wave(CW), interference pattern, interference signal, thickness measurement