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Conference Paper Agglomeration-suppressed Chalcogenization of Mo-metal Films Using Thermally Cracked Small S- and Se-molecules at Low Temperature
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Authors
Kwang Hoon Jung, Sun Jin Yun, Jung Wook Lim, Hyun-Jun Chai, Dae-Hyung Cho, Yong-Duck Chung, Gayoung Kim
Issue Date
2019-06
Citation
European Conference and Exhibition in Graphene and 2D Materials (Graphene) 2019, pp.386-386
Language
English
Type
Conference Paper
KSP Keywords
low temperature, metal films, s-