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Journal Article Crafting a 1.5 μm Pixel Pitch Spatial Light Modulator using Ge2Sb2Te5 Phase Change Material
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Authors
Yong-Hae Kim, Seong M. Cho, Kyunghee Choi, Chi Young Hwang, Gi Heon Kim, Sanghoon Cheon, Chi-Sun Hwang
Issue Date
2019-12
Citation
Journal of the Optical Society of America A, v.36, no.12, pp.23-30
ISSN
1084-7529
Publisher
Optical Society of America (OSA)
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.1364/JOSAA.36.000D23
Abstract
For this research, we have developed key technologies for a 1.5 쨉m pixel pitch spatial light modulator (SLM) using Ge2Sb2Te5 (GST) phase change material. To uniformly modulate each pixel, we designed a lateral pixel structure in which a heating current flows through a bottom indium tin oxide layer. To check hologram reconstruction both after multilevel fabrication processes and before implementing full source and driver circuits, we fabricated an 8 K × 2 K hologram on the topology by changing the GST film's phase using laser irradiation. To overcome the limitation of SLM size, we tested a physical tiling structure and found that flatness of tiled SLMs was the most important factor in the realization of holographic displays.
KSP Keywords
Driver circuit, Fabrication process, Hologram reconstruction, Holographic display, Indium Tin Oxide(ITO), Key technology, Laser irradiation, Phase Change Material(PCM), Pixel structure, S phase, Spatial light modulator(SLM)