상세정보
학술지
Crafting a 1.5 μm Pixel Pitch Spatial Light Modulator using Ge2Sb2Te5 Phase Change Material
- 발행일
- 201912
- 출처
- Journal of the Optical Society of America A, v.36 no.12, pp.23-30
- ISSN
- 1084-7529
- 출판사
- Optical Society of America (OSA)
- 협약과제
- 19MR1400, 디지털 홀로그래픽 테이블탑형 단말 기술 개발, 김진웅
- 초록
- For this research, we have developed key technologies for a 1.5 쨉m pixel pitch spatial light modulator (SLM) using Ge2Sb2Te5 (GST) phase change material. To uniformly modulate each pixel, we designed a lateral pixel structure in which a heating current flows through a bottom indium tin oxide layer. To check hologram reconstruction both after multilevel fabrication processes and before implementing full source and driver circuits, we fabricated an 8 K × 2 K hologram on the topology by changing the GST film's phase using laser irradiation. To overcome the limitation of SLM size, we tested a physical tiling structure and found that flatness of tiled SLMs was the most important factor in the realization of holographic displays.
- KSP 제안 키워드
- Driver circuit, Hologram reconstruction, Key technology, Oxide layer, Phase Change Material(PCM), Pixel structure, S phase, Spatial light modulator(SLM), fabrication process, holographic display, indium tin oxide(ITO)