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학술지 Crafting a 1.5 μm Pixel Pitch Spatial Light Modulator using Ge2Sb2Te5 Phase Change Material
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저자
김용해, 조성목, 최경희, 황치영, 김기현, 전상훈, 황치선
발행일
201912
출처
Journal of the Optical Society of America A, v.36 no.12, pp.23-30
ISSN
1084-7529
출판사
Optical Society of America (OSA)
DOI
https://dx.doi.org/10.1364/JOSAA.36.000D23
협약과제
19MR1400, 디지털 홀로그래픽 테이블탑형 단말 기술 개발, 김진웅
초록
For this research, we have developed key technologies for a 1.5 쨉m pixel pitch spatial light modulator (SLM) using Ge2Sb2Te5 (GST) phase change material. To uniformly modulate each pixel, we designed a lateral pixel structure in which a heating current flows through a bottom indium tin oxide layer. To check hologram reconstruction both after multilevel fabrication processes and before implementing full source and driver circuits, we fabricated an 8 K × 2 K hologram on the topology by changing the GST film's phase using laser irradiation. To overcome the limitation of SLM size, we tested a physical tiling structure and found that flatness of tiled SLMs was the most important factor in the realization of holographic displays.
KSP 제안 키워드
Driver circuit, Hologram reconstruction, Key technology, Oxide layer, Phase Change Material(PCM), Pixel structure, S phase, Spatial light modulator(SLM), fabrication process, holographic display, indium tin oxide(ITO)