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Journal Article
Crafting a 1.5 μm Pixel Pitch Spatial Light Modulator using Ge2Sb2Te5 Phase Change Material
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- Authors
- Yong-Hae Kim, Seong M. Cho, Kyunghee Choi, Chi Young Hwang, Gi Heon Kim, Sanghoon Cheon, Chi-Sun Hwang
- Issue Date
- 2019-12
- Citation
- Journal of the Optical Society of America A, v.36, no.12, pp.23-30
- ISSN
- 1084-7529
- Publisher
- Optical Society of America (OSA)
- Language
- English
- Type
- Journal Article
- Abstract
- For this research, we have developed key technologies for a 1.5 쨉m pixel pitch spatial light modulator (SLM) using Ge2Sb2Te5 (GST) phase change material. To uniformly modulate each pixel, we designed a lateral pixel structure in which a heating current flows through a bottom indium tin oxide layer. To check hologram reconstruction both after multilevel fabrication processes and before implementing full source and driver circuits, we fabricated an 8 K × 2 K hologram on the topology by changing the GST film's phase using laser irradiation. To overcome the limitation of SLM size, we tested a physical tiling structure and found that flatness of tiled SLMs was the most important factor in the realization of holographic displays.
- KSP Keywords
- Driver circuit, Fabrication process, Hologram reconstruction, Holographic display, Indium Tin Oxide(ITO), Key technology, Laser irradiation, Phase Change Material(PCM), Pixel structure, S phase, Spatial light modulator(SLM)