상세정보
학술지
The New Route for Realization of 1-μm-pixel-pitch High-resolution Displays
- 발행일
- 201908
- 출처
- Journal of the Society for Information Display, v.27 no.8, pp.487-496
- ISSN
- 1071-0922
- 출판사
- Society for Information Display (SID)
- 협약과제
- 19MR1400, 디지털 홀로그래픽 테이블탑형 단말 기술 개발, 김진웅
- 초록
- A new pixel structure for the realization of a 1-μm-pixel-pitch display was developed. This structure, named vertically stacked thin-film transistor (VST), was based on the conventional back-channel etched thin-film transistor (TFT), but all the layers except the horizontal gate line were vertically stacked on the embedded data line, enabling the implementation of high-resolution display panels. The VST device with a channel length of 1혻μm showed a high field effect mobility of more than 50혻cm2/Vs and low subthreshold slope of 78혻mV per decade. It also shows a high uniform electrical characteristic over the entire 6-in. wafer. The development of a new pixel architecture is expected to enable the implementation of 1-μm-pixel-pitch high-resolution displays such as spatial light modulators for digital holograms.
- KSP 제안 키워드
- Channel Length, Data line, Gate line, High-resolution displays, Pixel structure, Spatial light modulator(SLM), Subthreshold slope(SS), Thin-Film Transistor(TFT), electrical characteristics, high field-effect mobility, thin film(TF)