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학술지 2.32 kV Breakdown Voltage Lateral β-Ga2O3 MOSFETs with Source-Connected Field Plate
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저자
문재경, 조규준, 장우진, 정현욱, 도재원
발행일
201907
출처
ECS Journal of Solid State Science and Technology, v.8 no.7, pp.3079-3082
ISSN
2162-8769
출판사
Electrochemical Society (ECS)
DOI
https://dx.doi.org/10.1149/2.0151907jss
협약과제
19PB3300, 저결함(1x104cm-2)특성의 고품위 Ga2O3 에피소재 및 1KV 이상의 항복전압을 가지는 전력소자 기술 개발, 문재경
초록
We report on demonstrating high performance lateral 棺-Ga2O3 metal-oxide-semiconductor field-effect transistors (MOSFETs) with source-connected field plate (FP) on a thin (150 nm) and highly Si-doped (n = 1.5 × 1018 cm?닋3) 棺-Ga2O3 epitaxial channel layer grown by ozone molecular beam epitaxy (MBE) on Fe-doped semi-insulating (010) substrate. For a MOSFET with a gate-drain spacing (Lgd) of 25 μm, the three terminal off-state breakdown voltage (VBR) tested in Fluorinert ambient reaches 2321 V. To the best of our knowledge, this is the first report of lateral 棺-Ga2O3 MOSFET with high VBR of more than 2 kV and the highest VBR attained among all the Ga2O3 MOSFETs. The breakdown voltages with different Lgd from 5??25 μm ranged from 518??2321V, with a linear trend of increasing breakdown voltage for larger spacing lateral MOSFETs. Combining with high electrical performances and excellent material properties, source-connected FP lateral 棺-Ga2O3 MOSFET implies its great potential for next generation high-voltage and high-power switching devices applications above 2 kV.
KSP 제안 키워드
Breakdown voltage(BDV), Channel layer, Fe-doped, Field Plate, Field-effect transistors(FETs), High performance, High-voltage and high-power, Linear trend, Metal-oxide(MOX), Metal-oxide-semiconductor field-effect transistor(MOSFET), Molecular beam epitaxy(MBE)