상세정보
학술대회
Liquid Operating TPoS MEMS Resonators with High Quality Factor
- 발행일
- 201910
- 출처
- IEEE Sensors 2019, pp.1-4
- 협약과제
- 19ZB1200, 임플란터블 능동 전자소자 원천기술 개발, 이정익
- 초록
- In this work, we proposed a liquid operating TPoS MEMS resonators with on-chip dummy resonator patterns. The fabricated plate type resonators achieve high Q factors in length extensional mode under vacuum, air and liquid environment. With the proposed on-chip dummy resonator patterns, the anti-resonance peak near the resonant frequency was effectively cancelled and Q factors were improved. A resonator with 400 μm and 600 μm plate length shows a Q factor of 10,072 and 14,435, respectively, under 1.0 mTorr. Q factors in liquid phase were measured 71 and 98 in Ethanol, respectively. It was also confirmed that the Q factors in liquid phase varied with the types of liquids (according to their viscosity and density).
- KSP 제안 키워드
- Extensional mode, High quality factor, Liquid environment, MEMS Resonators, On-chip, Quality-factor(Q-factor), Resonant frequency(Fr), anti-resonance peak, liquid phase