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Liquid Operating TPoS MEMS Resonators with High Quality Factor
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- Authors
- Chang Han Je, Hyunjoong Lee, Yil Suk Yang
- Issue Date
- 2019-10
- Citation
- IEEE Sensors 2019, pp.1-4
- Publisher
- IEEE
- Language
- English
- Type
- Conference Paper
- Abstract
- In this work, we proposed a liquid operating TPoS MEMS resonators with on-chip dummy resonator patterns. The fabricated plate type resonators achieve high Q factors in length extensional mode under vacuum, air and liquid environment. With the proposed on-chip dummy resonator patterns, the anti-resonance peak near the resonant frequency was effectively cancelled and Q factors were improved. A resonator with 400 μm and 600 μm plate length shows a Q factor of 10,072 and 14,435, respectively, under 1.0 mTorr. Q factors in liquid phase were measured 71 and 98 in Ethanol, respectively. It was also confirmed that the Q factors in liquid phase varied with the types of liquids (according to their viscosity and density).
- KSP Keywords
- Extensional mode, Liquid environment, MEMS Resonators, Q factor, Quality factor(VSWR and Q), Resonant Frequency, anti-resonance peak, high quality factor, liquid phase, on-chip