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Conference Paper
Ohmic Contacts with Recess-etched and TMAH-treated Nanometer-scale Patterns for Improved Performance and Reliability in AlGaN/GaN HEMTs
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- Authors
- Hyun-Wook Jung, Jae-Won Do, Sung-Jae Chang, Ho-Kyun Ahn, Haecheon Kim, Jong-Won Lim, Dong-Min Kang
- Issue Date
- 2020-02
- Citation
- 한국 반도체 학술 대회 (KCS) 2020, pp.790-790
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- AlGaN/GaN HEMTs, Improved performance, Nanometer-scale, Performance and Reliability, ohmic contact