BROWSE
Detail
Conference Paper
Low-loss, Low-crosstalk Silicon Nitirde Array Waveguide Grating using Multimode Waveguide at 850nm
Cited 0 time in 
Share 
Share
- Authors
- Jaegyu Park, Jiho Joo, Gyungock Kim
- Issue Date
- 2020-10
- Citation
- IEEE Photonics Conference (IPC) 2020, pp.1-2
- Publisher
- IEEE
- Language
- English
- Type
- Conference Paper
- Abstract
- We investigated silicon nitride(SixNy) arrayed waveguide grating (AWG) with multimode arrayed waveguide at 850nm wavelength to reduce phase error due to the sidewall roughness of the waveguide. The fabricated 8-channel SixNy AWG shows low crosstalk of-30dB and low loss of 0.5dB.
- KSP Keywords
- Array waveguide grating, Low crosstalk, Low loss, Sidewall roughness, Silicon Nitride, arrayed waveguide grating(AWG), multimode waveguide, phase error