ETRI-Knowledge Sharing Plaform

KOREAN
논문 검색
Type SCI
Year ~ Keyword

Detail

Journal Article Reactive Sputtering Process for CuIn 1-xGaxSe 2 Thin Film Solar Cells
Cited 12 time in scopus Download 10 time Share share facebook twitter linkedin kakaostory
Authors
Nae-Man Park, Ho Sub Lee, Jeha Kim
Issue Date
2012-10
Citation
ETRI Journal, v.34, no.5, pp.779-782
ISSN
1225-6463
Publisher
한국전자통신연구원 (ETRI)
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.4218/etrij.12.0212.0062
Project Code
11MB3100, Development of High Efficiency CIGS Ultra Thin-Film Solar Cells by Reactive Sputtering, Kim Je Ha
Abstract
CuIn 1-xGaxSe 2 (CIGS) thin films are grown on Mo/soda lime glass using a reactive sputtering process in which a Se cracker is used to deliver reactive Se molecules. The Cu and (In 0.7Ga 0.3) 2Se 3 targets are simultaneously sputtered under the delivery of reactive Se. The effects of Se flux on film composition are investigated. The Cu/(In+Ga) composition ratio increases as the Se flux increases at a plasma power of less than 30 W for the Cu target. The (112) crystal orientation becomes dominant, and crystal grain size is larger with Se flux. The power conversion efficiency of a solar cell fabricated using an 800-nm CIGS film is 8.5%. © 2012 ETRI.
KSP Keywords
CIGS film, Composition ratio, Conversion efficiency(C.E.), Crystal grain size, Film composition, Plasma power, Reactive sputtering process, Soda lime glass(SLG), Thin film solar cells, crystal orientation, power conversion efficiency