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Conference Paper
1m Pixel Pitch Spatial Light Modulator Panel for Digital Holography
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- Authors
- Chi-Sun Hwang, Ji Hun Choi, Jae-Eun Pi, Jong-Heon Yang, Gi-Heon Kim, Yong-Hae Kim, Joo Yeon Kim, Won-Jae Lee, Hee-Ok Kim, Ha Kyun Lee, MyungYu Kim, Jinwoong Kim
- Issue Date
- 2020-08
- Citation
- Society for Information Display (SID) International Symposium 2020, pp.297-300
- Language
- English
- Type
- Conference Paper
- Abstract
- Digital hologram images reconstructed through interference of the modulated light waves requires ultra high resolution display panel. BCE oxide TFTs with channel width of 0.5쨉m and channel length of 2쨉m were stacked on data line for the integration of 1쨉m pitch pixel. 1쨉m pixel pitch 16K spatial light modulator on glass substrate was successfully fabricated with vertically stacked TFT structure.
- KSP Keywords
- Channel Length, Channel Width, Data line, Digital hologram, Display Panel, Glass substrate, Light waves, Oxide TFTs, Spatial light modulator(SLM), digital holography, ultra-high resolution