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Conference Paper
증착장비용 등온장치 개발
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- Authors
- 문석환, 강환국, 이윤용
- Issue Date
- 2010-11
- Citation
- 대한설비공학회 학술 발표 대회 (동계) 2010, pp.334-339
- Publisher
- 대한설비공학회
- Language
- Korean
- Type
- Conference Paper
- Abstract
- This paper presents numerical study of heat transfer characteristics and effect of various factors which are affect the temperature distribution of the process glass installed above the large rectangular heater plate. For the calculation, heat flux and thermal condition of the heat plate and pressure in the chamber were considered as related factors. The results showed that the temperature gradient on the glass was increased as decrease the degree of vacuum because of the buoyancy force due to heated air. Also, as increased heat flux the temperature gradient was increased. In the case of isothermal heating wall, the temperature variation was smaller than the uniform heat flux condition.
- KSP Keywords
- Buoyancy force, Heat transfer characteristics, Isothermal heating, Numerical studies, Temperature distribution, Temperature gradient, Temperature variations, Thermal condition, Uniform heat flux