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학술지 The Potassium-Assisted P-Type Characteristics of Tin Oxide in Solution-Processed High-Performance Metal Oxide Thin-Film Transistors
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저자
남수지, 이수재, 피재은, 양종헌, 황치선, 조성행
발행일
202109
출처
Physica Status Solidi (A) - Applications and Materials Science, v.218 no.18, pp.1-7
ISSN
1862-6300
출판사
Wiley
DOI
https://dx.doi.org/10.1002/pssa.202100267
협약과제
21JB2600, 저온 공정 산화물 반도체 기반 초저전력 단일3차원 집적 로직 소자 및 아키텍쳐 개발, 조성행
초록
Developing high-performance p-type metal-oxide semiconductors comparable to n-type ones has opened a new window for the realization of transparent, flexible, and low-power integrated circuits in large-area electronics. Herein, the fabrication of solution-processed p-type metal-oxide thin-film transistors (TFTs) with excellent device performance at low temperatures using a novel material is reported. Potassium (K) content is introduced into the tin oxide precursor solution to stabilize the tin (II) oxide (SnO) phase rather than the tin (IV) oxide (SnO2) phase during thin-film formation. The optimized K-doped SnO (K-SnO) TFTs exhibit outstanding electrical performance, with a maximum Hall mobility of 51 cm2 V?닋1 s?닋1 and a field-effect hole mobility of 2.3 cm2 V?닋1 s?닋1. The achievement of the solution-processed K-SnO TFTs not only provides a significant step toward the development of complementary metal-oxide semiconductor circuits, but also represents a feasible approach for low-cost flexible p-type metal-oxide electronics.
KSP 제안 키워드
Complementary metal-oxide-semiconductor(CMOS), Hall mobility, High performance, Hole mobility, K-doped, Low temperature(LT), Low-Power, Low-cost, Metal-oxide(MOX), N-type, Novel material