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Conference Paper Defect Analysis of Single Crystal Substrate for III-Nitrides using X-ray Topography
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Authors
S. B. Bae, H. S. Lee, H. W. Jung, S. B. Kim, J. H. Kim
Issue Date
2021-11
Citation
한국방사광이용자협회 방사광 이용자 연구 발표회 2021, pp.47-47
Language
Korean
Type
Conference Paper
KSP Keywords
III-nitride, Single crystal, X-ray topography, defect analysis