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학술지 GaAs on Si Substrate with Dislocation Filter Layers for Wafer-scale Integration
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저자
김호성, 김태수, 안신모, 김덕준, 김갑중, 고영호, 안준태, 한원석
발행일
202110
출처
ETRI Journal, v.43 no.5, pp.909-915
ISSN
1225-6463
출판사
한국전자통신연구원 (ETRI)
DOI
https://dx.doi.org/10.4218/etrij.2021-0003
협약과제
21ZB1100, ICT 창의기술 개발, 백용순
초록
GaAs on Si grown via metalorganic chemical vapor deposition is demonstrated using various Si substrate thicknesses and three types of dislocation filter layers (DFLs). The bowing was used to measure wafer-scale characteristics. The surface morphology and electron channeling contrast imaging (ECCI) were used to analyze the material quality of GaAs films. Only 3-μm bowing was observed using the 725-μm-thick Si substrate. The bowing shows similar levels among the samples with DFLs, indicating that the Si substrate thickness mostly determines the bowing. According to the surface morphology and ECCI results, the compressive strained indium gallium arsenide/GaAs DFLs show an atomically flat surface with a root mean square value of 1.288 nm and minimum threading dislocation density (TDD) value of 2.4 × 107 cm?닋2. For lattice-matched DFLs, the indium gallium phosphide/GaAs DFLs are more effective in reducing the TDD than aluminum gallium arsenide/GaAs DFLs. Finally, we found that the strained DFLs can block propagate TDD effectively. The strained DFLs on the 725-μm-thick Si substrate can be used for the large-scale integration of GaAs on Si with less bowing and low TDD.
키워드
bowing, heteroepitaxy, metalorganic chemical vapor deposition, threading dislocation density
KSP 제안 키워드
Aluminum Gallium Arsenide, Atomically flat surface, Electron channeling contrast(ECC), Electron channeling contrast imaging, GaAs films, GaAs on Si, Gallium Arsenide(GaAs), Indium gallium arsenide, Indium gallium phosphide, Lattice matched, Material quality
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