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Journal Article
A highly Smart MEMS Acetone Gas Sensors in Array for Diet-monitoring Applications
- Authors
- Jae Eun Lee, Chan Kyu Lim, Hyunjoon Song, Sung-Yool Choi, Dae-Sik Lee
- Issue Date
- 2021-10
- Citation
- Micro and Nano Systems Letters, v.9, pp.1-6
- ISSN
- 2213-9621
- Publisher
- The Society of Micro and Nano Systems Letters
- Language
- English
- Type
- Journal Article
- Abstract
- In the present work, gas sensor arrays consisted of four different sensing materials based on CuO and their depositions on the MEMS microheaters were designed, fabricated and characterized. The sensor array is consisted with CuO, CuO with Pt NPs, ZnO?밅uO and ZnO?밅uO with Au NPs and their gas sensing properties are characterized for detection of exhaled breath-related VOCs. Through MEMS microheaters, power consumption is considered for application to healthcare devices which requires ultrasensitive acetone gas sensitivity. Also, using the principal component analysis, it enables to discriminate acetone gas, a biomarker for fat burning during diet, with other VOCs gases. The device would be applicable for on-site diet monitoring in the field of mobile healthcare.
- KSP Keywords
- Au nanoparticles(Au-NPs), Gas sensing properties, Mobile Healthcare, Monitoring applications, On-Site, Power Consumption, Principal Component analysis, Pt NPs, Sensing material, exhaled breath, gas sensitivity
This work is distributed under the term of Creative Commons License (CCL)
(CC BY)
(CC BY)
