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Stretchable and Transparent Interconnects With Hybrid Ag-Nanomesh/Indium Tin Oxide Structure
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- Authors
- Young Ho Kim, Hyuk-Jun Kang, Bock Soon Na, Jihye Lee, Dae-Geun Choi, Chan Woo Park
- Issue Date
- 2022-10
- Citation
- IEEE Electron Device Letters, v.43, no.10, pp.1768-1771
- ISSN
- 0741-3106
- Publisher
- IEEE
- Language
- English
- Type
- Journal Article
- Abstract
- We demonstrate a hybrid structure for both transparent and stretchable interconnects, that provides high conductance, stretchability, and transparency simultaneously. In this structure, a serpentine-shaped discrete Ag nanomesh formed by the nanotransfer printing technique works as the primary conducting layer, while an indium tin oxide thin film covering it allows planar contact with other devices for proper functions as interconnects. We have confirmed that the hybrid serpentine interconnects provide high conductance and stretching reliability comparable to that of opaque ductile metals, and the transmittance and sheet resistance can be controlled independently by modifying the structural parameters of the mesh layer. Based on conventional photolithography and etching processes compatible with the current flexible circuit technology, the new hybrid interconnect can be utilized in various devices requiring highly integrated transparent and stretchable circuits.
- KSP Keywords
- Ductile metals, Flexible circuits, Hybrid Interconnect, Hybrid structure, Indium tin oxide thin films, Oxide structure, indium tin oxide(ITO), nanotransfer printing, printing technique, sheet resistance, stretchable interconnects