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Conference Paper
Measurement of Spectral Noise Caused by Binarization in Computer-Generated Holograms Desgined for Lithographic Patterns
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- Authors
- Yongjun Lim, Kwan-Jung Oh, Jae-Hyeung Park
- Issue Date
- 2022-10
- Citation
- International Conference on Information and Communication Technology Convergence (ICTC) 2022, pp.803-805
- Publisher
- IEEE
- Language
- English
- Type
- Conference Paper
- Abstract
- Binarization is required to quantize data values in computer-generated holograms especially designed for lithographic process. However, there are some unwanted quality issues caused by binarization in reconstructing computer-generated holograms. In this paper, we experimentally show spectral noise components caused by the binarization.
- KSP Keywords
- Computer generated holograms(CGH), Lithographic process, Noise components, Spectral noise, lithographic patterns, quality issues