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Conference Paper Measurement of Spectral Noise Caused by Binarization in Computer-Generated Holograms Desgined for Lithographic Patterns
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Authors
Yongjun Lim, Kwan-Jung Oh, Jae-Hyeung Park
Issue Date
2022-10
Citation
International Conference on Information and Communication Technology Convergence (ICTC) 2022, pp.803-805
Publisher
IEEE
Language
English
Type
Conference Paper
DOI
https://dx.doi.org/10.1109/ICTC55196.2022.9952707
Abstract
Binarization is required to quantize data values in computer-generated holograms especially designed for lithographic process. However, there are some unwanted quality issues caused by binarization in reconstructing computer-generated holograms. In this paper, we experimentally show spectral noise components caused by the binarization.
KSP Keywords
Computer generated holograms(CGH), Lithographic process, Noise components, Spectral noise, lithographic patterns, quality issues