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Conference Paper
Amorphous Oxide TFTs with IGZO Channels Deposited by Ionized Physical Vapor Deposition Method
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- Authors
- Jun-Yong Bak, Woo-Seok Cheong, Mi-Hee Lee, Sung Mook Chung, Hong-Seung Kim
- Issue Date
- 2010-11
- Citation
- International Conference on Electronic Materials and Nanotechnology for Green Environment (ENGE) 2010, pp.1-1
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Amorphous oxide, Ionized physical vapor deposition, Oxide TFTs, Vapor deposition method