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Conference Paper
Characteristics of thin-body indium oxide thin-film transistors with diverse channel length fabricated by atomic layer deposition
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- Authors
- Ju-Hun Lee, Seung-Youl Kang, Jong-Heon Yang, Chi-Sun Hwang, Jaehyun Moon
- Issue Date
- 2022-11
- Citation
- International Conference on Electronic Materials and Nanotechnology for Green Environment (ENGE) 2022, pp.1-1
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Atomic Layer Deposition, Channel Length, Thin-Film Transistor(TFT), indium oxide, oxide thin-film transistors, thin film(TF)