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학술대회
Characteristics of thin-body indium oxide thin-film transistors with diverse channel length fabricated by atomic layer deposition
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- 발행일
- 202211
- 출처
- International Conference on Electronic Materials and Nanotechnology for Green Environment (ENGE) 2022, pp.1-1
- 협약과제
- 22JB2400, 초고해상도/초유연 디스플레이 백플레인 핵심소재 기술 개발, 황치선
- KSP 제안 키워드
- Atomic Layer Deposition, Channel Length, Thin-Film Transistor(TFT), indium oxide, oxide thin-film transistors, thin film(TF)