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학술대회
Metal Oxide Thin-Film Transistors with Deep Submicron Channel Enabled by Self-Aligned Nano Gap Patterning
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- 발행일
- 202210
- 출처
- The Electrochemical Society (ECS) Meeting 2022, pp.1-23
- 협약과제
- 22IB1300, M3D 산화물반도체 기반 초저소비전력 고대역 대용량 DRAM 개발, 조성행
- KSP 제안 키워드
- Deep Submicron, Metal-oxide(MOX), Thin-Film Transistor(TFT), metal oxide thin-film transistors, nano-gap, self-Aligned, thin film(TF)