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Conference Paper
Metal Oxide Thin-Film Transistors with Deep Submicron Channel Enabled by Self-Aligned Nano Gap Patterning
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- Authors
- Chihun Sung, Sooji Nam, Sung Haeng Cho
- Issue Date
- 2022-10
- Citation
- The Electrochemical Society (ECS) Meeting 2022, pp.1-23
- Publisher
- Electrochemical Society (ECS)
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Deep Submicron, Metal-oxide(MOX), Thin-Film Transistor(TFT), metal oxide thin film transistors, nano-gap, self-Aligned, thin film(TF)