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Conference Paper Fabrication of AlGaN/GaN Heterostructure FET using Multi-Step Ohmic Annealing Process
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Authors
Zin-Sig Kim, Hyung-Seok Lee, Sung-Bum Bae
Issue Date
2023-02
Citation
한국반도체 학술대회 (KCS) 2023, pp.746-746
Language
English
Type
Conference Paper
KSP Keywords
AlGaN/GaN heterostructure, Multi-step, annealing process
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