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Conference Paper
Measurement of complex wave fields emanating from a phase-type spatial light modulator for the estimation of lithographic holograms
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- Authors
- Yongjun Lim, Myeong-Gyu Choi, Kwan-Jung Oh, Hwi Kim
- Issue Date
- 2023-08
- Citation
- Digital Holography and Three-Dimensional Imaging (DH) 2023, pp.1-2
- Language
- English
- Type
- Conference Paper
- Abstract
- Computational techniques related to computer-generated holograms are highly improved leading to improved holographic image quality and greater flexibility. We propose a quality assessment method of CGHs for lithographic holograms by the wavefront measurement.