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Conference Paper
Digital holographic profilometry with spherical-wave illumination scanning
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- Authors
- Moncy Sajeev Idicula, Kai Wen, Michał Józwik, Hyon-Gon Choo, Peng Gao, Tomasz Kozacki
- Issue Date
- 2023-10
- Citation
- Frontiers in Optics (FiO)/Laser Science ((LS) 2023, pp.1-2
- Language
- English
- Type
- Conference Paper
- Abstract
- A novel measurement method named multi-angle spherical-wave scanning digital holographic profilometry (MISDHP) for acquiring the surface of high gradient objects beyond the NA of the setup is proposed.
- KSP Keywords
- High gradient, Multi-angle, measurement method