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Conference Paper DBADMI(N,N’-di-tert-butylacetimidamido)dimethyllindium) as a Novel Liquid Indium Precursor for Atomic Layer Deposition and its use in In2O3 Thin-Film Transistors
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Authors
Ju-Hun Lee, Seung-Youl Kang, Changbong Yeon, Jong-Heon Yang, Jaesun Jung, Kok Chew Tan, Chi-Sun Hwang, Jaehyun Moon
Issue Date
2024-03
Citation
International Thin-Film Transistor Conference (ITC) 2024, pp.1-2
Language
English
Type
Conference Paper