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Conference Paper 3-dB Bandwidth Enhancement via Mesa-Diameter Reduction in a InGaAs/InP Modified Uni-Travelling Carrier Photodiode Structure
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Authors
Duk-Jun Kim, Shinmo An, Dong-Hun Lee, Seok-Jun Yun, Young-Tak Han
Issue Date
2024-10
Citation
International Conference on Information and Communication Technology Convergence (ICTC) 2024, pp.1460-1461
Publisher
IEEE
Language
English
Type
Conference Paper
DOI
https://dx.doi.org/10.1109/ICTC62082.2024.10827424
Abstract
Lens-integrated InGaAs/InP photodiodes whose mesa diameters range from 7 to 25 micrometers were fabricated by applying a wet-etch photodiode-mesa forming process to a 2-inch semi-insulating InP wafer with a modified uni-travelling carrier epitaxial structure. It was experimentally confirmed that the mesa diameters less than 14 micrometers produce a saturated maximum 3-dB bandwidth of about 45 GHz.
KSP Keywords
3-dB bandwidth, 45 GHz, Bandwidth enhancement, Diameter reduction, Epitaxial structure, Forming processes, Semi-Insulating, Wet etch, uni-travelling carrier photodiode