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Conference Paper GaAs mHEMT Technology Achieving a High Cut-off Frequncy of 446 GHz with a Gate Length of 75 nm
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Authors
Jong Yul Park, Byoung-Gue Min, Jong-Min Lee, Woojin Chang, Hong-Gu Ji, Junhyung Jeong, Junhyung Kim, Gyejung Lee, Kyujun Cho, Dong Min Kang
Issue Date
2024-10
Citation
International Conference on Information and Communication Technology Convergence (ICTC) 2024, pp.1468-1469
Publisher
IEEE
Language
English
Type
Conference Paper
DOI
https://dx.doi.org/10.1109/ICTC62082.2024.10826917
Abstract
This work explores GaAs mHEMTs with an InGaAs channel. By using recess wet etching process, a cut-off frequency (ft) of 446 GHz was achieved with a gate length (Lg) of 75 nm. This result is the highest record for GaAs mHEMTs in the gate length range of 70-80 nm and highlights the potential of mHEMTs as a cost-effective solution for 6G MMIC applications.
KSP Keywords
5 nm, 6 GHz, GaAs mHEMT, InGaAs channel, Wet etching process, cost-effective, cutoff frequency, gate length