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Conference Paper
Demonstration of ultra-fine micro-pressure sensors by the application of semiconductor process to supramolecular ion gel matrix
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- Authors
- Sun-Kyu Jung, Kyung-Hyun Kim, Jin Ha Kim, Mangu Kang, Jeong Hun Kim, Dongwoo Suh
- Issue Date
- 2024-10
- Citation
- IEEE Sensors 2024, pp.1-1
- Publisher
- IEEE
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Gel matrix, Micro-pressure, Pressure Sensor, Semiconductor process, Ultra-fine, ion gel