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Digital holographic profilometry with volumetric aberration compensation
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- Authors
- Moncy Sajeev Idicula, Kai Wen, Michał Józwik, Hyon-Gon Choo, Peng Gao, Tomasz Kozacki
- Issue Date
- 2024-04
- Citation
- SPIE Photonics Europe 2024 (SPIE 12998), pp.1-7
- Publisher
- SPIE
- Language
- English
- Type
- Conference Paper
- Abstract
- Holography has amassed increased attention over time, especially in direct recording using CCD arrays and numerical reconstruction. This surge is particularly notable in 3D imaging techniques like Digital holographic microscopy (DHM), which serves as a non-contact profilometric instrument for revealing the topography of microscopic objects. As for, multi-angle digital holographic profilometry (MIDHP) combines DHM and multi-angle interferometry has a good ability to measure the profile of samples and solve the 2π ambiguity problem. Despite significant progress in MIDHP, challenges arise from computation inaccuracies or data deficiencies, especially in the presence of aberrations when acquiring sufficient information of high numerical aperture (NA) samples using the classical compensation method. To address this, we introduce spherical-wave illumination scanning digital holographic profilometry (SWS-DHP), which has proven to be effective in profiling high-NA objects. Since the classical aberration compensation proved inadequate in this case, this paper proposes a new aberration compensation method based on the propagation of object and illumination waves, automatically correcting aberrations within the entire 3D volume of the reconstruction. Our investigation employs a model-based approach, and the accuracy of this new method will be tested numerically and experimentally, particularly on high-NA and high-depth objects.
- KSP Keywords
- 3D imaging techniques, 3D volume, Compensation method, Digital Holographic Microscopy(DHM), Model-based approach, Multi-angle, Non-contact, Numerical reconstruction, Over time, aberration compensation, high numerical aperture