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Journal Article
Fabrication of low-loss symmetrical rib waveguides based on x-cut lithium niobate on insulator for integrated quantum photonics
- Authors
- Hong-Seok Kim, Guhwan Kim, Tetiana Slusar, Jinwoo Kim, Jiho Park, Jaegyu Park, Hyeon Hwang, Woojin Noh, Hansuek Lee, Min-Kyo Seo, Kiwon Moon, Jung Jin Ju
- Issue Date
- 2024-10
- Citation
- ETRI Journal, v.46, no.5, pp.783-792
- ISSN
- 1225-6463
- Publisher
- 한국전자통신연구원
- Language
- English
- Type
- Journal Article
- Abstract
- Lithium niobate on insulator (LNOI) is a promising material platform for applications in integrated quantum photonics. A low optical loss is crucial for preserving fragile quantum states. Therefore, in this study, we have fabricated LNOI rib waveguides with a low optical propagation loss of 0.16 dB/cm by optimizing the etching conditions for various parameters. The symmetry and smoothness of the waveguides on x-cut LNOI are improved by employing a shallow etching process. The proposed method is expected to facilitate the development of on-chip quantum photonic devices based on LNOI.
- KSP Keywords
- Etching conditions, Etching process, Integrated quantum photonics, Lithium niobate(LN), Low loss, Optical losses, Optical propagation loss, Quantum states, on-chip, photonic devices, rib waveguide
This work is distributed under the term of Korea Open Government License (KOGL)
(Type 4: : Type 1 + Commercial Use Prohibition+Change Prohibition)
(Type 4: : Type 1 + Commercial Use Prohibition+Change Prohibition)
