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Detail
Journal Article
Quantum electrodynamical formulation of photochemical acid generation and its implications on optical lithography
- Authors
- Seungjin Lee
- Issue Date
- 2024-10
- Citation
- ETRI Journal, v.46, no.5, pp.774-782
- ISSN
- 1225-6463
- Publisher
- 한국전자통신연구원
- Language
- Korean
- Type
- Journal Article
- KSP Keywords
- Optical lithography
This work is distributed under the term of Korea Open Government License (KOGL)
(Type 4: : Type 1 + Commercial Use Prohibition+Change Prohibition)
(Type 4: : Type 1 + Commercial Use Prohibition+Change Prohibition)
