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Millisecond Pulsed Light Annealing for Improving Performance of Top-Gate Self-Aligned a-IGZO TFT
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- Authors
- Heetae Kim, Seohak Park, Johak Jeong, Jun-Hwe Cha, Hoseok Lee, Chihun Sung, Jeho Na, Keun Heo, Sung Haeng Cho, Sung-Yool Choi, Byung Jin Cho
- Issue Date
- 2025-05
- Citation
- IEEE Transactions on Electron Devices, v.72, no.5, pp.2399-2405
- ISSN
- 0018-9383
- Publisher
- IEEE
- Language
- English
- Type
- Journal Article
- KSP Keywords
- Pulsed light, a-IGZO TFTs, amorphous indium-gallium-zinc oxide(a-IGZO), self-Aligned, top-gate