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Journal Article Investigation of Chlorine-Induced Damage in Oxide Semiconductor Transistors

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Authors: Jae Won Na, Seungbin Lee, Hyeonhong Min, Gwanghyeon Jang, Minseop Song, I. Sak Lee, Jong-Heon Yang, Min Jung Kim, Kwun-Bum Chung, Si Joon Kim

Issue Date: 2025-07

Citation: ACS Applied Electronic Materials, v.7, no.13, pp.6128-6136

ISSN: 2637-6113

Publisher: American Chemical Society

Language: English

Type: Journal Article

DOI: https://dx.doi.org/10.1021/acsaelm.5c00844

KSP Keywords: oxide semiconductor

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