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Conference Paper
3-dB Bandwidth Enlargement of an InGaAs Photodiode by Inductive Signal Electrode
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- Authors
- Duk-Jun Kim, Seok-Jun Yun, Shinmo An, Dong-Hun Lee, Young-Tak Han
- Issue Date
- 2025-07
- Citation
- Opto-Electronics and Communications Conference (OECC) 2025 / International Conference on Photonics in Switching and Computing (PSC) 2025, pp.1-3
- Language
- English
- Type
- Conference Paper
- Abstract
- Four types of backside-illuminated InGaAs photodiodes, all with a mesa diameter of 10 μm but differing in the width and length of the CPW signal electrode, were fabricated. The fabricated photodiodes exhibited a responsivity of 0.66 A/W. Additionally, a 3-dB bandwidth exceeding 67 GHz was achieved for the photodiodes with a 5 μm-wide and 313 or 513 μm-long signal electrode owing to the inductive peaking.
- KSP Keywords
- 3-dB bandwidth, InGaAs photodiode, inductive peaking