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Conference Paper Surface Refinement and Electrical Enhancement of 3D GaN fin Structures through TMAH Treatment
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Authors
Hyun-Woo Lee, Hyeon-Tak Kwak, Jaewon Park, Hoe-Min Kwak, Sang-Mo Koo, Sung-Bum Bae, Hyung-Seok Lee
Issue Date
2025-07
Citation
Internatinoal Conference on Nitride Semiconductors (ICNS) 2025, pp.646-646
Language
English
Type
Conference Paper
KSP Keywords
Electrical enhancement, Surface refinement
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