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Conference Paper High-Performance SiN Grating Coupler with a Metal Bottom Reflector on Glass for Co-Packaged Optical Systems
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Authors
Heeyun Jung, Myung-Joon Kwack, Younghyun Kim
Issue Date
2025-07
Citation
Opto-Electronics and Communications Conference (OECC) 2025 / International Conference on Photonics in Switching and Computing (PSC) 2025, pp.1-3
Language
English
Type
Conference Paper
DOI
https://dx.doi.org/10.23919/OECC/PSC62146.2025.11109990
Abstract
We propose a dual-apodized a-Si/SiN grating coupler with a bottom reflector on a glass substrate, achieving -0.86 dB coupling efficiency and 47 nm bandwidth at 1.31μm, demonstrating for low-loss optical interconnects in CPO.
KSP Keywords
A-Si, Bottom reflector, Glass substrate, High performance, Low loss, Optical Interconnects, Optical System, coupling efficiency, grating coupler